MCP (Microchannel Plate)

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MCP(Microchannel Plate)

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MCP (microchannel plate) is a two-dimensional sensor that detects electrons, ions, vacuum UV rays, X-rays and gamma rays, and amplifies the detected signals. Circular and rectangular MCPs are available in various dimensions, including easy-to-use MCP assemblies with pre-mounted electrode leads and supports. These MCPs (microchannel plate) are widely used in many types of analytical equipment such as for "mass spectroscopy", "semiconductor inspection" and "surface analysis".

The MCP (microchannel plate) assemblies are available with three different readout devices to meet application needs. The devices are of: (1) single anode (electrical output signal measurement within effective region), (2) multianode (electrical output signal measurement corresponding to signal input positions), and (3) phosphor screen (optical imaging of output signal). Select the output device that best matches your application.

From one to three stage MCPs (microchannel plate) can be selected for the assembly to obtain necessary gain, allowing uses in the analog mode (the output signal is measured as a continuous electrical current) or the counting mode (the low level signal can be measured by a binary processing).

MCP（微通道板）是偵測在真空中的電子，離子，真空紫外光，X射線和γ射線，並放大檢測到的信號的二維傳感器。Hamamatsu 提供各種尺寸的圓形及方型的MCP(微通道板),包含易於安裝的MCP模組。這些MCP廣泛應用於許多類型的分析設備，如“質譜分析”，“半導體檢測”和“表面分析”。

MCP組件提供三種不同的讀取裝置，以滿足應用需求;分別為器件有：（1）單陽極（有效區域內的電輸出信號測量），（2）多節點（與信號輸入位置對應的電氣輸出信號測量）和（3）熒光屏（輸出信號的光學成像）。

OPERATING PRINCIPLE

As shown in the figure on the lower right, a potential gradient is established along the channel when the voltage VD is applied be- tween the input and output sides of the MCP. Multiple secondary electrons are emitted when an electron enters a channel from the input side and strikes its inner wall. These secondary electrons are accelerated by the potential gradient to draw parabolic trajecto- ries that are determined by their initial velocities. They then strike the opposite wall in the channel causing further secondary elec- trons to be emitted. The electrons in this way travel towards the output end while striking the inner wall of the channel repeatedly. As a result, a large number of exponentially increased electrons are extracted from the output side.

■Thickness

The thickness of an MCP is nearly equal to the channel length. The ratio of the channel length (L) to the channel diameter (d) is referred to as α (α=L/d), and this α and the secondary emission factor inherent to the channel wall material determine the gain of the MCP. Standard MCPs are fabricated so that α is 40 to 60. The MCP thickness is therefore determined by the required chan- nel diameter and the design value of this α.

■Open Area Ratio: OAR

The OAR indicates the ratio of the channel open area to the en- tire effective area of and MCP.

■Bias angle

The bias angle is an angle formed by the channel axis and the axis perpendicular to the plate surface. This angle is chosen by considering the detection efficiency and spatial resolution as well as the prevention of input signals from passing through the channels without colliding with the channel walls. The optimum value is usually from 5° to 15°.

LARGE OAR: FUNNEL TYPE

The open area ratio (OAR) of standard MCPs (microchannel plate) is normally set to about 60 %, but we also provide "funnel type" MCPs (microchannel plate) whose open area ratio is improved up to 90% in order to guide more signals into each channel. Please contact us if you are interested in funnel type MCPs (microchannel plate).

CHARACTERISTCS

APPLICATION

● Time-of-flight mass spectroscopy(TOF-MS)(MALDI)

● Time-of-flight mass spectroscopy (TOF-MS) (LC-MS)

● Quadrupole mass spectroscopy (Q-MS)

● Double focusing mass spectroscopy (Sector-MS)

● Gas or liquidchromatographic mass spectroscopy (GC/LC-MS)

● Inductive-coupled plasma mass spectroscopy (ICP-MS)

● Secondary ion mass spectroscopy (SIMS)

● Scanning electron microscope (SEM)

● Scanning ion microscope (SIM)

● Electron beam measuring system (EBMS)

● Electron or ion beam lithography

● Mask aligner

● FIB system

● Auger electron spectroscopy (AES)

● Ion scattering spectroscopy (ISS)

● Electron spectroscopy for chemical analysis (ESCA)

● Rutherford backscattering spectroscopy (RBS)

● Vacuum UV spectroscopy (VUVS)

● Soft X-ray spectroscopy (SXS)

● Reflection medium energy electron diffraction (RMEED)

● Low energy electron diffraction (LEED)

● Field ion microscope (FIM)

● Transmission electron microscope (TEM)

● Soft X-ray microscope (SXM)

● Positron detector

MCP SPECIFICATIONS AND DIMENSIONAL OUTLINES

◎ Circular MCP

Type Parameter	F1551				F1094			F1552			F1208-01	F1217		F1942-04	F2395-04	Unit
	-01^⑤	-06	-011	-074	-01^⑤	-011	-074	-01^⑤	-011	-074		-01^⑤	-011
Outer size A	17.9				24.8			32.8			38.4	49.9		86.7	113.9	mm
Electrode area B	17				23.9			31.8			36.5	49		84.7	112	mm
Effective area C	14.5				20			27			32	42		77	105	mm
Thickness D	0.48	0.2	0.48	0.3	0.48		0.3	0.48		0.3	0.48	0.48		1		mm
Channel diameter	12	4	12	6	12		6	12		6	12	12		25		µm
Channel pitch	15	5	15	7.5	15		7.5	15		7.5	15	15		31		µm
Bias angle θ	8	12			8	12		8	12		8	8	12	8		degrees
Open area ratio	60	55	60													%
Electrode material	Inconel															—
Gain (Min.) ^③	10⁴			5×10³	10⁴		5×10³	10⁴		5×10³	10⁴					—
Resistance ^③	100 to 700	10 to 100	20 to 100	20 to 200	50 to 500	10 to 50	10 to 100	15 to 200	6.7 to 33.3	6.7 to 66	20 to 100	10 to 200	4 to 20	10 to 100	5 to 50	MΩ
Dark current (Max.) ^③	0.5															pA·cm^-2
Maximum linear output ^③	7 % of strip current ^②															—
Supply voltage ^④	1															kV
Operating ambient temperature ^④	-50 to +70															°C

◎ Rectangular MCP

Type Parameter	F2370-01	F4772-01	F2806-01	F1943-02	F2805-03	F2396-04	Unit
Type Parameter	F2370-01	F4772-01	F2806-01	F1943-02	F2805-03	F2396-04	Unit
Outer size A×A'	15.9×9.4	61.9×13.9	49.9×39.9	87.9×37.9	59.9×59.9	96.9×78.9	mm
Electrode size B×B'	15×8.5	61×13	49×39	87×37	58×58	95.6×77.3	mm
Effective area C×C'	13×6.5	55×8	45×35	81×31	53×53	90×72	mm
Thickness D	0.48			0.6	0.8	1	mm
Channel diameter	12			15	20	25	µm
Channel pitch	15			19	25	31	µm
Bias angle θ	8						degrees
Open area ratio	60						%
Electrode material	Inconel						—
Gain (Min.)^③	104						—
Resistance^③	100 to 500	20 to 200			20 to 120	10 to 50	MΩ
Dark current (Max.)^③	0.5						pA·cm^-2
Maximum linear output^③	7 % of strip current^②						—
Supply voltage^④	1						kV
Operating ambient temperature^④	-50 to +70						°C

MCP ASSEMBLY SELECTION GUIDE BY PURPOSE

MCP ASSEMBLY SPECIFICATIONS AND DIMENSIONAL OUTLINES (Unit: mm)

◎ Circular (Non-demountable)

Anode type	Number of MCPs
Without readout device	1 to 3
Single anode
Multianode

Phosphor output type are not available.

Symbol	Description			F1551	F1094	F1552	F1208	F1217	Unit
A	Assembly outer size			φ27	φ34	φ42	φ49	φ62	mm
B	Effective area			φ14.5	φ20	φ27	φ32	φ42	mm
C	Assembly height	No. of MCPs	1	4.5					mm
			2	5.7
			3	5.7
D	Lead pin circle			22.5	29.5	37.5	44	56	mm

* Multianode types have different dimensions.

Types with no anode are also available.

Type No.	Channel diameter (µm)	Number of MCPs	Gain (Min.)	Puls height resolution (Max.) (%)	Dark count (Max.) (s^-1·cm^-2)	MCP supply voltage (kV)	MCP-OUT to anode supply voltage (kV)
F1551	12	1 to 3	1 stage MCP : 1 × 10⁴ 2 stage MCP : 1 × 10⁶ 3 stage MCP : 1 × 10⁷	2 stage MCP: 120 3 stage MCP: 80	3 (2 or 3 stage MCP)	1 stage MCP: 1.0 2 stage MCP: 2.0 3 stage MCP: 3.0	Single anode: 0.5 Multianode: 0.5
F1094
F1552
F1208
F1217

Note:

① Supply voltage: 1.0 kV/MCP, vacuum: 1.3×10^-4 Pa, operating ambient temperature: +25 °C

② Vacuum: 1.3×10^-4 Pa

TYPE NUMBER DESIGNATION FOR NON-DEMOUNTABLE TYPE

The following ordering information applies only to circular MCP assemblies (non-demountable type). When ordering other MCPs (non-assembled MCPs) and MCP assemblies, use their type numbers as listed.

* When the customer prepares a read-out device, we supply MCP assemblies without readout devices.

◎ Circular (Demountable)

Type No.	Channel diameter (µm)	Number of MCPs	Gain (Min.)	Puls height resolution (Max.) (%)	Dark count (Max.) (s^-1·cm^-2)	MCP supply voltage (kV)	MCP-OUT to anode supply voltage (kV)
F2221	12	Refer to "Anode Type" below	1 stage MCP : 1 × 10⁴ 2 stage MCP : 1 × 10⁶ 3 stage MCP : 1 × 10⁷	2 stage MCP: 120 3 stage MCP: 80	3 (2 or 3 stage MCP)	1 stage MCP: 1.0 2 stage MCP: 2.0 3 stage MCP: 3.0	Single anode: 0.5 Multianode: 0.5 Phosphor screen : 3.0 to 4.0
F2222
F2223
F2224
F2225
F2226	25

Note:

① Supply voltage: 1.0 kV/MCP, vacuum: 1.3×10^-4 Pa, operating ambient temperature: +25 °C

① Vacuum: 1.3×10^-4 Pa

Perform the vacuum baking under 150 °C while keeping the exhaust system at a vacuum pressure below 1.3 × 10-4 Pa.

Anode type	Number of MCPs
Without readout device	1 to 3
Single anode
Multianode
Phosphor screen	1 to 2

Symbol	Description			F2221	F2222	F2223	F2224	F2225	F2226	Unit
A	Assembly outer size			φ54	φ61	φ69	φ75	φ86	φ123	mm
B	Mounting screw hole pitch			φ46	φ53	φ61	φ67	φ78	φ115	mm
C	Insulator outer size			φ34	φ41	φ49	φ55	φ66	φ103	mm
D	Effective area			φ14.5	φ20	φ27	φ32	φ42	φ77	mm
E	Effective area of readout device			φ10	φ17	φ24	φ30	φ40	φ75	mm
F	Maximum height			15	15	15	15	15	17	mm
G	Distance from bottom of substrate to insulator surface	No. of MCPs	1	10.9					12.9	mm
			2	11.9					14.4
			3	11.9					15.9
H	Distance from bottom of substrate to insulator surface	No. of MCPs	1	2.8					3.8	mm
			2	3.3					4.3
			3	2.9					4.8

Shape may differ depending on product type number.

◎ Rectangular (Demountable)

Type No.	Channel diameter (µm)	Number of MCPs	Gain (Min.)	Puls height resolution (Max.) (%)	Dark count (Max.) (s^-1·cm^-2)	MCP supply voltage (kV)	MCP-OUT to anode supply voltage (kV)
F2813	15	Refer to "Anode Type" below	1 stage MCP : 1 × 10⁴ 2 stage MCP : 1 × 10⁶ 3 stage MCP : 1 × 10⁷	2 stage MCP: 120 3 stage MCP: 80	3 (2 or 3 stage MCP)	1 stage MCP: 1.0 2 stage MCP: 2.0 3 stage MCP: 3.0	Single anode: 0.5 Multianode: 0.5 Phosphor screen : 3.0 to 4.0
F2814	20
F3490	12

Note:

① Supply voltage: 1.0 kV/MCP, vacuum: 1.3×10^-4 Pa, operating ambient temperature: +25 °C

② 2Vacuum: 1.3×10^-4 Pa

Perform the vacuum baking under 150 °C while keeping the exhaust system at a vacuum pressure below 1.3 × 10^-4 Pa.

Symbol	Description			F2813	F2814	F3490	Unit
A×A'	Assembly outer size			128×54	96×76	78×29.5	mm
B×B'	Mounting screw hole pitch			120×46	86×68	72×18	mm
C×A'	Insulator outer size			104×54	76×76	66×29.5	mm
D×D'	Effective area			81×31	53×53	55×8	mm
E×E'	Effective area of readout device			80×30	50×50	52×7	mm
F	Distance from bottom of substrate to insulator surface	No. of MCPs	1	10.9	10.9	11.9	mm
			2	11.9	11.9
			3	11.9	12.9
G	Distance from bottom of substrate to insulator surface	No. of MCPs	1	2.7	2.5	3.8	mm
			2	3.1	2.7	3.3
			3	2.5	2.9	2.9

Anode type	Number of MCPs
Without readout device	1 to 3
Single anode
Multianode
Phosphor screen	1 to 2

Shape may differ depending on product type number.

PHOSPHOR SCREEN

Select the desired phosphor screen by taking into account the decay time according to the readout method and application, and the emission wavelength according to the readout device sensitivity.

Phosphor screen type	Peak emission wavelength (nm)	Emission color	Relative energy efficiency	10 % decay time	Remarks
P43	545	Yellowish green	1	1 ms	Standard type
P46	510	Yellowish green	0.3	0.2 µs to 0.4 µs	Short decay
P47	430	Purplish blue	0.3	0.11 µs	Very short decay

NOTE:

① Supply voltage: 6 kV. Value relative to P43 which is specified as 1.

② Varies depending on the input pulse width.

Spectral emission characteristics		Decay characteristics

		③ Decay characteristics after removal of continuous light input

TYPE NUMBER DESIGNATION FOR DEMOUNTABLE TYPE

The following ordering information applies only to circular/rectangular MCP assemblies (demountable type). When ordering other MCPs (non-assembled MCPs) and MCP assemblies, use their type numbers as listed.

* When the customer prepares a read-out device, we supply MCP assemblies without readout devices. If using a phosphor screen as the readout device, there is a need to change some points, so please consult us in advance.

Type No.	Channel diameter (µm)	Number of MCPs	Gain (Min.)	Pulse height resolution (Max.) (%)	Dark count (Max.) (s^-1·cm^-2)	MCP supply voltage (kV)	MCP-OUT to anode supply voltage (kV)
F4655	12	2	5 × 10⁷	50	3	2.5	0.5
F4655-14	12	2	5 × 10⁷	50	3	2.5	0.5

NOTE:

① Supply voltage: 1.0 kV/MCP, vacuum: 1.3×10^-4 Pa, operating ambient temperature: +25 °C

② Vacuum: 1.3×10^-4 Pa

◎ F4655

Perform the vacuum baking under 150 °C while keeping the exhaust system at a vacuum pressure below 1.3 × 10^-4 Pa.

◎ F4655-14

Perform the vacuum baking under 150 °C while keeping the exhaust system at a vacuum pressure below 1.3 × 10^-4 Pa.

Type No.	Channel diameter (µm)	Number of MCPs	MCP center dead area (mm)	Gain (Min.)	Pulse height resolution (Max.) (%)	Dark count (Max.) (s^-1·cm^-2)	MCP supply voltage (kV)	MCP-OUT to anode supply voltage (kV)
F2223-21SH	12	2	8	1 × 10⁶	—	3	2	0.5
F4294-09	12	2	12	1 × 10⁶	—	3	2	0.5

NOTE:

① Supply voltage: 1.0 kV/MCP, vacuum: 1.3×10-4 Pa, operating ambient temperature: +25 °C

② Vacuum: 1.3×10-4 Pa

◎ F2223-21SH

◎ F4294-09

Type No.	Channel diameter (µm)	Number of MCPs	Pulse width (FWHM) (ps)	Gain (Min.)	Pulse height resolution (Max.) (%)	Dark count (Max.) (s^-1·cm^-2)	MCP supply voltage (kV)	MCP-OUT to anode supply voltage (kV)
F9890-13	12	2	900	1 × 10⁶	150	3	2	0.5
F9890-14	6		900
F9890-31	12		450
F9890-32	6		450
F9892-13	12		1200
F9892-14	6		1200
F9892-31	12		700
F9892-32	6		700

NOTE:

① Supply voltage: 1.0 kV/MCP, vacuum: 1.3×10^-4 Pa, operating ambient temperature: +25 °C

② Vacuum: 1.3×10^-4 Pa

◎ F9890-13/-14, F9892-13/-14

	F9890-13	F9890-14	F9892-13	F9892-14
A	φ27		φ42
B	φ81		φ92
C	φ63		φ75
D	12	11.6	12	11.6
E	10	9.6	10	9.6
F	φ72		φ84
G	φ52		φ64

◎ F9890-31/-32, F9892-31/-32

		F9890-31	F9890-32	F9892-31	F9892-32
A		φ27		φ42
B		φ81		φ92
C		φ63		φ75
D		20.2	19.9	20.2	19.9
E		18.2	17.9	18.2	17.9
	MCP-IN LEAD	13.5	13.9	13.5	13.9
F	MCP-OUT LEAD	15.2		15.2
	ANODE LEAD	19.4		19.4
G		φ35		φ40
H		φ72		φ84
I		φ52		φ64

Type No.	Channel diameter (µm)	Number of MCPs	Pulse width (FWHM) (ps)	Gain (Min.)	Pulse height resolution (Max.) (%)	Dark count (Max.) (s^-1·cm^-2)	MCP supply voltage (kV)	MCP-OUT to anode supply voltage (kV)
F4655-10	12	2	600	5 × 10⁷	50	3	2.5	0.5
F4655-11	12			5 × 10⁷	50	3	2.5
F4655-13	4			1 × 10⁶	120	5	2

NOTE:

① Supply voltage: 1.0 kV/MCP, vacuum: 1.3×10^-4 Pa, operating ambient temperature: +25 °C

② Vacuum: 1.3×10^-4 Pa

◎ F4655-10/-13

◎ F4655-11

Type No.	Channel diameter (µm)	Number of MCPs	Pulse width (FWHM) (ps)	Gain (Min.)	Pulse height resolution (Max.) (%)	Dark count (Max.) (s^-1·cm^-2)	MCP supply voltage (kV)	MCP-OUT to anode supply voltage (kV)
F12334-11	12	2	1.5	1 × 10⁶	—	3	—	0.5
F12395-11
F12396-11

NOTE:

① Supply voltage: 1.0 kV/MCP, vacuum: 1.3×10^-4 Pa, operating ambient temperature: +25 °C

② Vacuum: 1.3×10^-4 Pa

◎ F12334-11, F12395-11, F12396-11

Type No.	Channel diameter (µm)	Number of MCPs	Gain (Min.)	Pulse height resolution (Max.) (%)	Dark count (Max.) (s^-1·cm^-2)	MCP supply voltage (kV)	MCP-OUT to anode supply voltage (kV)
F2225-21PGF	12	2	1 × 10⁶	—	3	2	4
F6959	12	2	1 × 10⁶	—	3	2	3

NOTE:

① Supply voltage: 1.0 kV/MCP, vacuum: 1.3×10^-4 Pa, operating ambient temperature: +25 °C

② Vacuum: 1.3×10^-4 Pa

◎ F2225-21PGF

◎ F6959

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