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LCOS-SLM (for research applications)-X15213 series

E-mail contact

+886-2-8772-8910

Features
Pure, linear and precise phase control
High light utilization efficiency 
High diffraction efficiency
High power handling capability 
Ease of use (DVI compatible) 
Reflective type
 
Applications
Laser material processing 
Optical manipulation
Wavefront correction
Pulse shaping 
Optical testing
 
LCOS chip inside the head

 

Principle of modulation
The LCOS chip has a parallel-aligned nematic liquid crystal layer to modulate light. It only changes the phase of light without any change of intensity and rotation of polarization state. Phase modulation is changed according to the alignment of the LC. The LC alignment is controlled, pixel by pixel, using a CMOS backplane and a DVI signal via a PC.  

 

Selection guide

There are eight types in the X15213 series, which cover different wavelengths of light sources. They can be grouped into dielectric mirror types (-02/-03/-05/-13/-16) and aluminum mirror types (-01/-07/-08). To  enhance the reflectivity of the device, dielectric   mirror types have dielectric mirrors corresponding to different wavelengths of laser light source. [-02: titanium sapphire laser (800 nm band), -03: YAG laser (1064 nm), -05: LD (405 nm), -13: YAG laser 2nd harmonic (532 nm)/He-Ne laser (633 nm), -16: YAG laser 2nd harmonic (532 nm)]. The increased reflectivity achieved by the dielectric mirror decreases the internal absorption rate. This allows accommodation for high powered lasers, but the covered wavelength range is narrowed. Aluminum mirror types use reflections from the aluminum electrodes on the CMOS chip. The reflectivity is inferior to that of the former, but the reflection wavelength range is wider, covering a range of 400 nm to 1550 nm with just three types. For the wavelength band between 1350 and 1400 nm on the -08 type, the reflectance degrades about 5% due to the absorption by the glass substrate. Dielectric mirror types for the 532 nm band are available in-13 and -16. The -16 is designed to be more light-resistant to short-pulse lasers than the -13. Water cooled types have L or R (where   L and R indicate the water stream connector positions left and right, respectively) appended to the number -02, -03, or -16 which indicates the wavelength range.

 

 

 

 

 

 

 

 

 

 

 

 

 

Absolute maximum ratings

Parameter

Operating temperature
(°C)

Storage temperature
 (°C)

Withstand pressure of water stream connector
(MPa)

X15213-01/-02/-03/-05/-07/-08/-13/-16

+10 to +40*1

-20 to +55*1

-

X15213-02L/-02R/-03L/-03R/-16L/-16R

0.3

*1: No condensation. Humidity may cause deterioration of characteristics, so be careful with the humidity.
     The characteristics of this product depend on temperature. Using this product at an ambient temperature of about 25 °C is recommended.
     When there is a temperature difference between a product and the surrounding area in high humidity environment, dew condensation may occur on the product surface. Dew condensation on the product may cause deterioration in characteristics and reliability.
Note: Exceeding the absolute maximum ratings even momentarily may cause a drop in product quality. Always be sure to use the product within the absolute maximum ratings.

 

Structure

Head

Parameter

Number of pixels
(pixels)

Pixel pitch
(μm)

Effective area size
(mm)

Fill factor
(%)

Weight
(g)

X15213 series

1272 × 1024

12.5

15.9 × 12.8

96

150
(Water cooled type: 550)

Controller

Parameter

Supply voltage AC
(V)

Power supply frequency
(Hz)

Weight

Input signal

DVI signal format
(pixels)

Input signal level
(levels)

DVI frame rate
(Hz)

Power consumption
(W)

Main unit
(g)

Including cables
(g)

X15213 series

100 to 230

50/60

910

1350

Digital Video Interface (DVI-D)/USB-B (2.0 High-speed)

1280 × 1024

256

60

15

Electrical and optical characteristics

Parameter

Readout light wavelength
(nm)

Light utilization efficiency typ.
(%)

Rise time*2
(ms)

Fall time*2
 (ms)

X15213-01

400 to 700

79 (633 nm)

5 (633 nm)

25 (633 nm)

X15213-02

800 ± 50

97 (785 nm)

30 (785 nm)

80 (785 nm)

X15213-02L

X15213-02R

X15213-03

1050 ± 50

97 (1064 nm)

25 (1064 nm)

80 (1064 nm)

X15213-03L

X15213-03R

X15213-05

410 ± 10

97 (405 nm)

10 (405 nm)

20 (405 nm)

X15213-07

620 to 1100

82 (1064 nm)

10 (1064 nm)

80 (1064 nm)

X15213-08

1000 to 1550

82 (1064 nm)

30 (1064 nm)

140 (1064 nm)

X15213-13

530 to 635

97 (532 nm)

10 (532 nm)

25 (532 nm)

X15213-16

510 ± 50

97 (532 nm)

11 (532 nm)

34 (532 nm)

X15213-16L

X15213-16R

*2: Time required to change from 10% to 90% for 2π modulation (typical value)

 

Operating characteristics

Light utilization efficiency
The X15213 series have high light utilization efficiency, which is defined a ratio of the 0th order diffraction light level to the input light level. The high light utilization efficiency mainly depends on reflectivity, and the amount of diffraction loss caused by the pixel structure. We adopted advanced CMOS technology to make the diffraction loss smaller. As a result, the diffraction loss is less than 5%. The -02/- 03/-04/-05/-06/-09 types have a dielectric mirror which has high reflectivity. Therefore, these types have very high light utilization efficiency. The -01/-07/-08 types have relatively low light utilization efficiency compared to the ones with the dielectric mirror but have wide spectral response characteristics.

Phase modulation

The X15213 series can achieve phase modulation of more than 2π radians over the 400-1550 nm readout wavelength range. The X15213 series comes pre-calibrated from the factory for a specified wavelength range to have more than 2π radians of phase modulation and its linear characteristics. Figure 2 shows typical phase modulation characteristics. A phase shift of 2π radians or more and a linear phase response are achieved. The phase modulation curves for 95% pixels lies within +/- 2 σ.   [Figure 2] Phase modulation (typical example)
 


Diffraction efficiency
The X15213 series is a pure phase SLM with high precision phase control; therefore, it has high diffraction efficiency close to the theoretical values. Figure 3 shows images of diffracted spots, when a multi-level phase grating is formed in the X15213 series and Figure 4 shows typical diffraction efficiency characteristics. Here, the diffraction efficiency is defined I1/I0, I1 is intensity of the 1st order diffraction spot, I0 is the intensity of the 0th order light when no pattern is displayed.

[Figure 3] Diffracted spots images (typical example)   [Figure 4] Diffraction efficiency (typical example)
 
(a) No pattern  
 
(b) 2-level grating (40 lp/mm)  
 
(c) 4-level grating (20 lp/mm)  

Output image examples
The X15213 series has high precision phase control and high diffraction efficiency, and is very suitable for holographic applications. Figure 5 (a) is a interferometer picture of the output wavefront with a flatness calibration. The image in Figure 5 (b) was reconstructed as the 1st diffraction order of the phase hologram through the Fourier transform optics. Figure 5 (c) shows a clear Laguerre Gaussian (LG) beam of (0, 1) order.

   
(a) Interferogram of output wavefront with calibration 1272 × 1024 pixels
RMS: 0.025 λ (λ=532 nm)
  (b) Reconstructed image of CGH   (c) LG beam

Light resistance
The LCOS-SLM features versatility and high reliability, but exposure to high power laser light increases the temperature and may cause characteristic degradation or damage. Water cooled types (-02L/-02R/-03L/-03R/-16L/-16R) have built-in cooling heatsink in the head section to improve the light resistance by suppressing temperature increases caused by laser irradiation.

 

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